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Eco-vector
Poverhnostʹ. Rentgenovskie, sinhrotronnye i nejtronnye issledovaniâ
ISSN 1028-0960 (Print)
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Keywords X-ray diffraction X-ray photoelectron spectroscopy atomic force microscopy channeling electron microscopy ion implantation irradiation magnetron sputtering microstructure nanoparticles neutron reflectometry optical properties phase composition scanning electron microscopy silicon structure surface surface morphology synchrotron radiation thin films zinc oxide
Current Issue

No 3 (2025)

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Keywords X-ray diffraction X-ray photoelectron spectroscopy atomic force microscopy channeling electron microscopy ion implantation irradiation magnetron sputtering microstructure nanoparticles neutron reflectometry optical properties phase composition scanning electron microscopy silicon structure surface surface morphology synchrotron radiation thin films zinc oxide
Current Issue

No 3 (2025)

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Morozov, O. V.

Issue Section Title File
No 11 (2024) Articles Control of Mask Erosion and Correction of Structure Profile in an Adapted Process of Deep Reactive Ion Etching of Silicon
 

 

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